Equipment list

 

The University of Kentucky's Center for Nanoscale Science and Engineering is an open access research facility serving academic and industrial users in fields as diverse as engineering, the physical and life sciences, the arts, medicine, pharmacy, and agriculture.  The center provides cutting edge instrumentation to all qualified users to enable the study and development of nanoscale materials and devices.  The center also serves as a repository for nanotechnology related expertise and a catalyst for new research collaborations and technology transfer.  The center is located in U.K.’s Advanced Science and Technology Commercialization Center (ASTeCC) and consists of class 100 clean room and supporting laboratories and offices.

For more details on our equipment and and their capabilities, please choose from the list below:

Facilities (includes UPW, compressed air, Ar, O2, N2)

Clean room - rm 369

        Cleanbench - Solvent (rm 369)

 

Furnaces / ovens:

       Annealing Furnace

        General Furnace

        Inert gas oven

        Oxidation Furnace

        Rapid Thermal Processing (RTP)

        High Temp Furnace

 

Depsosition

        E-Beam Evaporator

        Sputtering System (Small)

        Sputtering System (Large)

        Atomic Layer Deposition

        Thermal Evaporator

 

Etch

        Plasma Etch (Microwave Induced)

         Reactive Ion Etching (RIE)

 

Lithography:

        Spin coater

        Mask Aligner

        Electron Beam Lithography

 

3D printing:

        Nanoscribe GT

         Ember SLA

 

Metrology:

        Atomic Force Microscope with Isolation Chamber

         Cold Probe

         Probe station and Electronics Rack

         Quartz Crystal Microbalance with Dissapation (QCM-D)

         Spectroscopic Ellipsometer

         Plasma Enhanced Chemical Vapor Deposition (PECVD)

 

You can check the equipment availability here