Mask Aligner Karl Suss MJB3

Karl Suss MJB3

The SUSS MJB 3 Mask Aligner is designed for high resolution photolithography in a laboratory,

development or pilot production environment. The product fine offers unsurpassed flexibility in the

handling of irregularly shaped substrates and pieces of differing thicknesses, as well as standard

size wafers up to 3" in diameter.

With the modular construction, the equipment lends itseH to ease of service; functional groups are

easily accessible and assemblies can be quickly modified or exchanged.

Various configurations are characterized by different fight sources and alignment modes.

Manual here

SOP here