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Probe Station and Electronics Rack

Cascade Microtech RF-1 Microwave Probe Station

6"/150mm vacuum chuck 

Leica S6E trinocular stereozoom, 10x/23 eyepieces, 6.3-40x zoom, total magnification 6.3-40x, 36.5mm FOV, 110mm working distance, camera port

Independent X, Y, and Z movement of microscope 

Platen lift controls 

5 vacuum ports 

6 Measurement Terminals (Max 50VAC or 120VDC)

Manual X, Y, Z adjustment of Chuck 

Dimensions: 25" x 22" x 21.5" H 

Vacuum Requirement: 15" Hg 

Operations Manual 


  • Leica S8-APO stereo microscope (shown in photo) with CCD Camera Port (Trinocular), 10x/23 eyepieces, 8:1 zoom, total magnification 10-80x, 75mm working distance
  • MH2-B micropositioners with vacuum base, probe arm, and 100TPI lead screws (set of 4)