Annealing Furnace |
$11 |
$22 |
Probe Station |
$11 |
$22 |
Doping Furnace |
$11 |
$22 |
General Furnace |
$11 |
$22 |
Inert Gas Oven |
$11 |
$22 |
Microwave Induced Plasma Etch |
$11 |
$22 |
Oxidation Furnace |
$11 |
$22 |
Profilometer |
$11 |
$22 |
|
Spectroscopic Ellipsometer |
$22 |
$44 |
Atomic Force Microscope |
$22 |
$44 |
Clean room access (hoods, spin coater, microscopes) |
$22 |
$44 |
Quartz Micro Balance (OMB) |
$22 |
$44 |
Rapid Thermal Processing (RTP) |
$22 |
$44 |
Autodesk Ember 3D Printer |
$22 |
$44 |
Spectroscopic Ellipsometer |
$22 |
$44 |
Microspectroscopy |
$22 |
$44 |
|
Thermal Evaporator |
$33 |
$66 |
E-beam Evaporator |
$33 |
$66 |
Atomic Layer Deposition |
$33 |
$66 |
Mask Aligner |
$33 |
$66 |
Sputtering 1 (single target) |
$33 |
$66 |
Sputtering 2 (multi target) |
$33 |
$66 |
Plasma Enhanced Chemical Vapor Deposition (PECVD) |
$33 |
$66 |
|
Reactive lon Etching (RIE) |
$44 |
$88 |
Electron Beam Lithography |
$44 |
$88 |
Nanoscribe PPGT |
$44 |
$88 |
|
Staff - training, consulting, and processing |
$34 |
$68 |
Consumables (at cost) |