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  Internal Rates External Rates
Annealing Furnace $11 $22
Probe Station $11 $22
Doping Furnace $11 $22
General Furnace $11 $22
Inert Gas Oven $11 $22
Microwave Induced Plasma Etch $11 $22
Oxidation Furnace $11 $22
Profilometer $11 $22
 
Spectroscopic Ellipsometer $22 $44
Atomic Force Microscope $22 $44
Clean room access (hoods, spin coater, microscopes) $22 $44
Quartz Micro Balance (OMB) $22 $44
Rapid Thermal Processing (RTP) $22 $44
Autodesk Ember 3D Printer $22 $44
Spectroscopic Ellipsometer $22 $44
Microspectroscopy $22 $44
 
Thermal Evaporator $33 $66
E-beam Evaporator $33 $66
Atomic Layer Deposition $33 $66
Mask Aligner $33 $66
Sputtering 1 (single target) $33 $66
Sputtering 2 (multi target) $33 $66
Plasma Enhanced Chemical Vapor Deposition (PECVD) $33 $66
 
Reactive lon Etching (RIE) $44 $88
Electron Beam Lithography $44 $88
Nanoscribe PPGT $44 $88
 
Staff - training, consulting, and processing $34 $68
Consumables (at cost)