Rates

Tier 1Internal Rates /hrExternal Rates /hr
Annealing Furnace$35$35
Probe Station$35$35
Doping Furnace$35$35
General Furnace$35$35
Inert Gas Oven$35$35
Microwave Induced Plasma Etch$35$35
Oxidation Furnace$35$35
Profilometer$35$35
Tier 2Internal Rates /hrExternal Rates /hr
Atomic Force Microscope$35$35
Clean room access (hoods, supplies, microscopes)$35$35
Spin Coater$35$35
Quartz Micro Balance (OMB)$35$35
Rapid Thermal Processing (RTP)$35$35
Spectroscopic Ellipsometer$35$35
Bruker Dektak XT Surface Profiler$35$35
Tier 3Internal Rates /hrExternal Rates /hr
Electronic Beam Evaporator$48$48
Mask Aligner$48$48
Sputtering$48$48
Tier 4Internal Rates /hrExternal Rates /hr
Reactive lon Etching$60$85
Electron Beam Lithography$60$85
Two photon photolithography (Nanoscribe)$60$85