Tier 1 | Internal Rates /hr | External Rates /hr |
---|---|---|
Annealing Furnace | $11 | $22 |
Probe Station | $11 | $22 |
Doping Furnace | $11 | $22 |
General Furnace | $11 | $22 |
Inert Gas Oven | $11 | $22 |
Microwave Induced Plasma Etch | $11 | $22 |
Oxidation Furnace | $11 | $22 |
Profilometer | $11 | $22 |
Tier 2 | Internal Rates /hr | External Rates /hr |
---|---|---|
Spectroscopic Ellipsometer | $23 | $44 |
Atomic Force Microscope | $23 | $44 |
Clean room access (hoods, supplies, microscopes) | $23 | $44 |
Spin Coater | $23 | $44 |
Quartz Micro Balance (OMB) | $23 | $44 |
Rapid Thermal Processing (RTP) | $23 | $44 |
Spectroscopic Ellipsometer | $23 | $44 |
Bruker Dektak XT Surface Profiler | $23 | $44 |
Tier 3 | Internal Rates /hr | External Rates /hr |
---|---|---|
Electronic Beam Evaporator | $38 | $66 |
Mask Aligner | $38 | $66 |
Sputtering | $38 | $66 |
Tier 4 | Internal Rates /hr | External Rates /hr |
---|---|---|
Reactive lon Etching | $50 | $88 |
Electron Beam Lithography | $50 | $88 |
Two photon photolithography (Nanoscribe) | $50 | $88 |