| Tier 1 | Internal Rates /hr | External Rates /hr |
|---|---|---|
| Annealing Furnace | $35 | $53.90 |
| Probe Station | $35 | $53.90 |
| General Furnace | $35 | $53.90 |
| Inert Gas Oven | $35 | $53.90 |
| Microwave Induced Plasma Etch | $35 | $53.90 |
| Oxidation Furnace | $35 | $53.90 |
| Tier 2 | Internal Rates /hr | External Rates /hr |
|---|---|---|
| Atomic Force Microscope | $35 | $53.90 |
| Clean room access (hoods, supplies, microscopes) | $35 | $53.90 |
| Spin Coater | $35 | $53.90 |
| Quartz Micro Balance (OMB) | $35 | $53.90 |
| Rapid Thermal Processing (RTP) | $35 | $53.90 |
| Spectroscopic Ellipsometer | $35 | $53.90 |
| Bruker Dektak XT Surface Profiler (Profilometer) | $35 | $53.90 |
| Tier 3 | Internal Rates /hr | External Rates /hr |
|---|---|---|
| Electronic Beam Evaporator | $48 | $69.30 |
| Mask Aligner | $48 | $69.30 |
| Sputtering | $48 | $69.30 |
| Tier 4 | Internal Rates /hr | External Rates /hr |
|---|---|---|
| Reactive lon Etching | $60 | $85.00 |
| Electron Beam Lithography | $60 | $85.00 |
| Two photon photolithography (Nanoscribe) | $60 | $85.00 |