Rates

Tier 1Internal Rates /hrExternal Rates /hr
Annealing Furnace$35$53.90
Probe Station$35$53.90
General Furnace$35$53.90
Inert Gas Oven$35$53.90
Microwave Induced Plasma Etch$35$53.90
Oxidation Furnace$35$53.90
Tier 2Internal Rates /hrExternal Rates /hr
Atomic Force Microscope$35$53.90
Clean room access (hoods, supplies, microscopes)$35$53.90
Spin Coater$35$53.90
Quartz Micro Balance (OMB)$35$53.90
Rapid Thermal Processing (RTP)$35$53.90
Spectroscopic Ellipsometer$35$53.90
Bruker Dektak XT Surface Profiler (Profilometer)$35$53.90
Tier 3Internal Rates /hrExternal Rates /hr
Electronic Beam Evaporator$48$69.30
Mask Aligner$48$69.30
Sputtering$48$69.30
Tier 4Internal Rates /hrExternal Rates /hr
Reactive lon Etching$60$85.00
Electron Beam Lithography$60$85.00
Two photon photolithography (Nanoscribe)$60$85.00