| Annealing Furnace |
$11 |
$22 |
| Probe Station |
$11 |
$22 |
| Doping Furnace |
$11 |
$22 |
| General Furnace |
$11 |
$22 |
| Inert Gas Oven |
$11 |
$22 |
| Microwave Induced Plasma Etch |
$11 |
$22 |
| Oxidation Furnace |
$11 |
$22 |
| Profilometer |
$11 |
$22 |
| |
| Spectroscopic Ellipsometer |
$22 |
$44 |
| Atomic Force Microscope |
$22 |
$44 |
| Clean room access (hoods, spin coater, microscopes) |
$22 |
$44 |
| Quartz Micro Balance (OMB) |
$22 |
$44 |
| Rapid Thermal Processing (RTP) |
$22 |
$44 |
| Autodesk Ember 3D Printer |
$22 |
$44 |
| Spectroscopic Ellipsometer |
$22 |
$44 |
| Microspectroscopy |
$22 |
$44 |
| |
| Thermal Evaporator |
$33 |
$66 |
| E-beam Evaporator |
$33 |
$66 |
| Atomic Layer Deposition |
$33 |
$66 |
| Mask Aligner |
$33 |
$66 |
| Sputtering 1 (single target) |
$33 |
$66 |
| Sputtering 2 (multi target) |
$33 |
$66 |
| Plasma Enhanced Chemical Vapor Deposition (PECVD) |
$33 |
$66 |
| |
| Reactive lon Etching (RIE) |
$44 |
$88 |
| Electron Beam Lithography |
$44 |
$88 |
| Nanoscribe PPGT |
$44 |
$88 |
| |
| Staff - training, consulting, and processing |
$34 |
$68 |
| Consumables (at cost) |