Rates

Tier 1Internal Rates /hrExternal Rates /hr
Annealing Furnace$11$22
Probe Station$11$22
Doping Furnace$11$22
General Furnace$11$22
Inert Gas Oven$11$22
Microwave Induced Plasma Etch$11$22
Oxidation Furnace$11$22
Profilometer$11$22
Tier 2Internal Rates /hrExternal Rates /hr
Spectroscopic Ellipsometer$23$44
Atomic Force Microscope$23$44
Clean room access (hoods, supplies, microscopes)$23$44
Spin Coater$23$44
Quartz Micro Balance (OMB)$23$44
Rapid Thermal Processing (RTP)$23$44
Spectroscopic Ellipsometer$23$44
Tier 3Internal Rates /hrExternal Rates /hr
Electronic Beam Evaporator$38$66
Mask Aligner$38$66
Sputtering$38$66
Tier 4Internal Rates /hrExternal Rates /hr
Reactive lon Etching$50$88
Electron Beam Lithography$50$88
Two photon photolithography (Nanoscribe)$50$88